Improved vertical-scanning interferometry.

نویسندگان

  • A Harasaki
  • J Schmit
  • J C Wyant
چکیده

We describe a method that combines phase-shifting and coherence-peak-sensing techniques to permit measurements with the height resolution of phase-shifting interferometry without the interval-slope limitation of lambda/4 per data sample of phase-shifting interferometry. A five-frame algorithm is used to determine both the best-focus frame position and the fractional phase from the best-focus frame of the correlogram acquired through vertical scanning. The two surface profiles retrieved from the phase and the modulation contrast of the correlograms are compared in the phase-unwrapping process to remove fringe-order ambiguity.

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عنوان ژورنال:
  • Applied optics

دوره 39 13  شماره 

صفحات  -

تاریخ انتشار 2000